François Schiettekatte
Dynamics and uses of implantation defects in semiconductors
- Professeur titulaire
-
Faculté des arts et des sciences - Département de physique
Complexe des sciences, room B-4419
Media
Profile
Research expertise
Ion implantation is a technique for modifying the surface of materials by injecting precise quantities of atoms at the desired depth. It is widely used in doping semiconductors when manufacturing very large-scale integrated circuits (VLSI). Since it is a highly out-of-balance phenomenon (the incident atoms typically have energies millions of times higher than the atoms in the material), this implantation often generates new structures at the atomic level that can be exploited to improve the performance of high-tech materials, or may create problems to be overcome.
For instance, during the doping process, implantation creates defects in semiconductors by displacing crystal atoms, and this is damaging to integrated circuits. If there are not too many defects, the damage can be corrected by annealing and the dopant activated. If the density of the defects exceeds a certain threshold, however, permanent damage will appear in the materials and may make the devices unusable.
Inversely, ion implantation generates defects that can be used to modify materials. Implantation makes it possible to create defects near the surface that can later diffuse throughout the material and modify the composition of the lower layers by interdiffusion. In this way it is possible to change the emission wavelengths of quantum dots or wells and the properties of the magnetic layers.
Ion beams can also be used for highly sensitive quantitative measurement of the deep distribution of atoms in a material. In our laboratories we use various ion beam analysis techniques, in particular elastic recoil detection (ERD), a technique developed in our laboratories in the 1970s, and Rutherford backscattering spectrometry (RBS), RBS channelling and nuclear resonant reaction analysis (NRRA).
Biography
François Schiettekatte fait partie du groupe de matière condensée du département de physique de l'Université de Montréal. Il est entre autres spécialiste en analyse et modification des matériaux par faisceaux d'ions et en mesure de l’évolution thermique des nanostructures par nanocalorimétrie. Il fait partie de la Collaboration scientifique des détecteurs d'ondes graviationnelles LIGO dont son groupe travaille à rendre les miroirs plus silencieux (ou moins bruillants).
For more information…
- 09-09-2015 Les laboratoires insolites de l’UdeM
- 01-01-2015 - Octroi de plus de 26 M$ pour la recherche à l'UdeM
- 02-06-2014 - Ma fenêtre est une centrale électrique!
- 04-09-2013 - Une seconde
- 03-09-2010 - Montréal hôte de l’International Conference on Ion Beam Modification of Materials
- 03-09-2008 - Mesurer la chaleur libérée par des nanocristaux
Affiliations and responsabilities
Research affiliations
Research units
Directeur adjoint
Membre
Teaching and supervision
Teaching
Courses taught (current session only)
Programs
Student supervision
Theses and dissertation supervision (Papyrus Institutional Repository)
Simulation des mécanismes de dissipation mécanique interne du silicium amorphe
Cycle : Master's
Grade : M. Sc.
Synthèse de couches optiques par co-dépôt pour les miroirs de LIGO
Cycle : Master's
Grade : M. Sc.
Caractérisation et optimisation des paramètres physiques du Ta₂O₅ affectant le facteur de qualité de miroirs diélectriques
Cycle : Master's
Grade : M. Sc.
Relaxation et cristallisation du verre mou de chalcogénure Ge2Sb2Te5 après impact d’ions lourds à basse énergie
Cycle : Master's
Grade : M. Sc.
Évolution des défauts dans les fibres optiques irradiées
Cycle : Master's
Grade : M. Sc.
Effets des recuits ultra-rapides (10^5 K/s) sur la formation des siliciures métalliques en phase solide
Cycle : Doctoral
Grade : Ph. D.
Origine de la réduction de la durée de vie des photoporteurs dans le InGaAsP implanté à basse température
Cycle : Master's
Grade : M. Sc.
Mécanismes de recuit dans le silicium implanté par faisceau d’ion caractérisés par nanocalorimétrie
Cycle : Doctoral
Grade : Ph. D.
Structures photoniques à base de nanocristaux de silicium
Cycle : Master's
Grade : M. Sc.
Synthèse de couches ultra-minces de siliciures sur silicium cristallin et endommagé étudiée par microscopie et profilométrie en profondeur
Cycle : Master's
Grade : M. Sc.
Étude de phase des systèmes Ni/Si-endommagé et Ni/a-Si, par XRD résolue en temps et nanocalorimétrie
Cycle : Master's
Grade : M. Sc.
Étude de l'évolution thermique du dommage d'implantation dans le silicium par nanocalorimétrie
Cycle : Doctoral
Grade : Ph. D.
Relaxation du silicium amorphe étudiée par nanocalorimétrie
Cycle : Master's
Grade : M. Sc.
Projects
Research projects
Regroupement québécois sur les matériaux de pointe (RQMP)
Relaxation, friction interne et ondes gravitationnelles
Plateforme d'iinovation en procédés plasma avec caractérisation in-plasma des matériaux et nanomatériaux
Relaxation, friction interne et ondes gravitationnelles
Contrôle des contraintes mécaniques résiduelles dans les revêtements optiques: de leurs origine aux applications avancées
Regroupement québécois sur les matériaux de pointe ( RQMP )
Electron microscopy analysis of (nano)materials with environmental, biological and industrial importance
CALCUL QUEBEC
EVOLUTION OF NANOSCALE GLASSES
Bourse de stage international - Mané Seck / Regroupement québécois sur les matériaux de pointe ( RQMP )
Bourse de stage international - Megan Cowie / Regroupement québécois sur les matériaux de pointe ( RQMP )
Supplément COVID-19 CRSNG_EVOLUTION OF NANOSCALE GLASSES
Regroupement québécois sur les matériaux de pointe (RQMP) Hosted by McGill 2017-2021
Plateforme d'iinovation en procédés plasma avec caractérisation in-plasma des matériaux et nanomatériaux
Regroupement québécois sur les matériaux de pointe
DEVELOPMENT OF GERMANIUM FIBER BRAGG GRATINGS AND ER-DOPED FIBER AMPLIFIERS FOR OPERATION IN HARSH ENVIRONMENTS
REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE (RQMP)
DETECTEURS TERAHERTZ A BASE D'INGAASP ET SYSTÈME D'IMAGERIE THZ EN CHAMP PROCHE
REGROUPEMENT STRATEGIQUE - REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE (RQMP)
REGROUPEMENT QUEBECOIS SUR LES MATERIAUX DE POINTE - RQMP
DETECTEURS TERAHERTZ A BASE D'INGAASP ET SYSTÈME D'IMAGERIE THZ EN CHAMPS PROCHE
CANADIAN CHARGED PARTICLE ACCELERATOR CONSORTIUM (CCPAC)
DEVELOPING METHODS OF ULTRATHIN FILMS CHARACTERISATION: NANOCALORIMETRY AND ION BEAM ANALYSIS
GROUPE DE RECHERCHE EN PHYSIQUE ET TECHNOLOGIE DES COUCHES MINCES (GCM) - INSTALLATION CENTRALE POUR LA FABRICATIONET LA CARACTERISATION DES MATERIAUX ET DISPOSITIFS DE POINTE
DEVELOPING METHODS OF ULTRATHIN FILMS CHARACTERISATION: NANOCALORIMETRY AND ION BEAM ANALYSIS
ALUMINUM ADHESION OF POLYETHYLENE TEREPHTHALATE
Publications and presentations
Publications
Articles publiés (depuis 2018, nom en gras = membres du groupe)
136. K. J. Daniel, J. R. Smith, S. Ballmer, W. Bristol, J. C. Driggers, A. Effler, M. Evans, J. Hoover, K. Kuns, M. Landry, G. Lovelace, C. Lukinbeal, V. Mandic, K. Pham, J. Read, J. B. Russell, F. Schiettekatte, R. M. S. Schofield, C. A. Scholz, D. H. Shoemaker, P. Sledge, A. Strunk, Criteria for identifying and evaluating locations that could potentially host the Cosmic Explorer observatories, Rev. Sci. Instrum. 96, 014502 (2025).
135. P. Vinchon, S. Hamaguchi, S. Roorda, F. Schiettekatte, L. Stafford, Self-healing kinetics in monolayer graphene following very low energy ion irradiation, Carbon 233, 119852 (2025).
134. S. Bhowmick, R. Osovsky, A. Davenport, F. Schiettekatte, M. Chicoine, C. S. Menoni, Unveiling the cation ratio mediated structural modifications in TiO2: GeO2 mixtures for gravitational-wave detectors, Class. Quant. Grav. 41, 105007 (2024).
133. D. Diksha, A. Amato, V. Spagnuolo, G. I. McGhee, M. Chicoine, C. Clark, S. Hill, J. Hough, R. Johnston, R. Keil, Optical properties of germania and titania at 1064 nm and at 1550 nm, Class. Quant. Grav. 41, 125006 (2024).
132. L.-C. Fortier, M. Chicoine, S. Chouteau, M. Clausse, É. Lalande, A. W. Lussier, S. Roorda, L. Stafford, G. Terwagne, F. Schiettekatte, In plasma ion beam analysis of polymer layer and adsorbed H monolayer etching, Nucl. Instrum. Meth. B 554, 083305 (2024).
131. É. Lalande, A. Davenport, L. Marchand, A. Markosyan, D. Martinez, A. Paolone, M. Rezac, M. Bazzan, M. Chicoine, J. L. Colaux, M. Coulon, M. M. Fejer, A. W. Lussier, E. Majorana, L. Martinu, C. Menoni, C. Michel, F. Ricci, F. Schiettekatte, N. Shcheblanov, J. R. Smith, J. Teillon, G. Terwagne, G. Vajente, Ar transport and blister growth kinetics in titania-doped germania-based optical coatings, Class. Quant. Grav. 41, 115013 (2024).
130. A. W. Lussier, D. Bourbonnais-Sureault, M. Chicoine, R. Martel, L. Martinu, S. Roorda, F. Schi- ettekatte, Raman-based mapping and depth-profiling of the relaxation state in amorphous silicon, J. Appl. Phys. 135, 065301 (2024).
128. A. Aghdaei, A. Akbari-Sharbaf, M. Chicoine, F. Schiettekatte, G. Fanchini, D. Morris, Experimental evidence for spin–triplet states in titanium implanted AlN film: an electron spin resonance study, Physica B 654, 414708 (2023).
127. C. Gier, M. Ben Yaala, C. Wiseman, S. MacFoy, M. Chicoine, F. Schiettekatte, J. Hough, S. Rowan, I. Martin, P. MacKay, S. Reid, Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition, Thin Solid Films 771, 139781 (2023).
126. G. I. McGhee, V. Spagnuolo, N. Demos, S. C. Tait, P. G. Murray, M. Chicoine, P. Dabadie, S. Gras, J. Hough, G. A. Iandolo, Titania mixed with silica: a low thermal-noise coating material for gravitational- wave detectors, Phys. Rev. Lett. 131, 171401 (2023).
124. K. Prasai, K. Lee, B. Baloukas, H.-P. Cheng, M. Fazio, L. Martinu, A. Mehta, C. S. Menoni, F. Schi- ettekatte, R. Shink, B. Shyam, G. Vajente, M. M. Fejer, R. Bassiri, Effects of elevated-temperature deposition on the atomic structure of amorphous Ta2O5 films, APL Mater. 11, 121112 (2023).
123. P. Vinchon, S. Asadollahi, C. Coté, S. Marcet, S. Atallah, E. Dessureault, M. Chicoine, A. Sarkissian, R. Leonelli, S. Roorda, In-plasma analysis of plasma–surface interactions, Rev. Sci. Instrum. 94, 083305 (2023).
120. M. Granata, A. Amato, M. Bischi, M. Bazzan, G. Cagnoli, M. Canepa, M. Chicoine, A. D. Michele, G. Favaro, D. Forest, G. M. Guidi, G. Maggioni, F. Martelli, M. Menotta, M. Montani, F. Piergiovanni, F. Schiettekatte, Optical and mechanical properties of ion-beam-sputtered MgF2 thin films for gravitational- wave interferometers, Phys. Rev. Appl 17, 034058 (2022).
119. C. Lévesque, S. Roorda, F. Schiettekatte, N. Mousseau, Internal mechanical dissipation mechanisms in amorphous silicon, Phys. Rev. Mater. 6, 123604 (2022).
118. A. W. Lussier, É. Lalande, M. Chicoine, C. Lévesque, S. Roorda, B. Baloukas, L. Martinu, G. Vajente, A. Ananyeva, F. Schiettekatte, Hydrogen concentration and mechanical dissipation upon annealing in zirconia-doped tantala thin films for gravitational wave observatory mirrors, in Journal of physics: conference series, Vol. 2326 (IOP Publishing, 2022), 012020.
116. M. Abernathy, A. Amato, A. Ananyeva, S. Angelova, B. Baloukas, R. Bassiri, G. Billingsley, R. Birney, G. Cagnoli, M. Canepa, M. Coulon, J. Degallaix, A. Di Michele, M. A. Fazio, M. M. Fejer, D. Forest, C. Gier, M. Granata, A. M. Gretarsson, E. M. Gretarsson, E. Gustafson, E. J. Hough, M. Irving, É. Lalande, C. Lévesque, A. W. Lussier, A. Markosyan, I. W. Martin, L. Martinu, B. Maynard, C. S. Menoni, C. Michel, P. G. Murray, C. Osthelder, S. Penn, L. Pinard, K. Prasai, S. Reid, R. Robie, S. Rowan, B. Sassolas, F. Schiettekatte, R. Shink, S. Tait, J. Teillon, G. Vajente, M. Ward, L. Yang, Exploration of co-sputtered Ta2O5–ZrO2 thin films for gravitational-wave detectors, Class. Quant. Grav. 38, 195021 (2021).
115. É. Lalande, A. W. Lussier, C. Lévesque, M. Ward, B. Baloukas, L. Martinu, G. Vajente, G. Billingsley, A. Ananyeva, R. Bassiri, M. M. Fejer, F. Schiettekatte, Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors, J. Vac. Sci. Technol. A 39, 043416 (2021).
113. H. Nozard, F. Schiettekatte, Arrhenius behavior of crystallization at up to 184 000 K/s in Ge2Sb2Te5 thin films, AIP Adv. 11, 085226 (2021).
112. F. Schiettekatte, Energy conservation strategies for electric vehicles on hills, Am. J. Phys 89, 1018–1025 (2021).
111. G. Vajente, L. Yang, A. Davenport, M. Fazio, A. Ananyeva, L. Zhang, G. Billingsley, K. Prasai, A. Markosyan, R. Bassiri, M. M. Fejer, M. Chicoine, F. Schiettekatte, C. S. Menoni, Low mechanical loss TiO2:GeO2 coatings for reduced thermal noise in gravitational wave interferometers, Phys. Rev. Lett. 127, 071101 (2021).
110. L. Yang, G. Vajente, M. Fazio, A. Ananyeva, G. Billingsley, A. Markosyan, R. Bassiri, K. Prasai, M. M. Fejer, M. Chicoine, F. Schiettekatte, C. S. Menoni, Enhanced medium-range order in vapor-deposited germania glasses at elevated temperatures, Sci. Adv. 7, eabh1117 (2021).
109. A. Aghdaei, R. Pandiyan, B. Ilahi, M. Chicoine, M. El Gowini, F. Schiettekatte, L. G. Frechette, D. Morris, Engineering visible light emitting point defects in Zr-implanted polycrystalline AlN films, J. Appl. Phys. 128, 245701 (2020).
108. M. Sun, S. Li, J. Zou, Z. Cui, Q. Zhang, F. Schiettekatte, D. Barba, B. Liu, Y. Wang, Graphene- wrapped ZnMn2O4 nanoparticles with enhanced performance as lithium-ion battery anode materials, Nano 15, 2050117 (2020).
107. S. Vallières, M. Salvadori, P. Puyuelo-Valdes, S. Payeur, S. Fourmaux, F. Consoli, C. Verona, E. d’Humières, M. Chicoine, S. Roorda, F. Schiettekatte, P. Antici, Thomson parabola and time-of-flight detector cross-calibration methodology on the ALLS 100 tw laser-driven ion acceleration beamline, Rev. Sci. Instrum. 91, 103303 (2020).1
105. A. Albert, M. André, M. Anghinolfi, M. Ardid, J.-J. Aubert, J. Aublin, T. Avgitas, B. Baret, J. Barrios- Martí, S. Basa, Search for multimessenger sources of gravitational waves and high-energy neutrinos with advanced LIGO during its first observing run, ANTARES, and IceCube, Astrophys. J. 870, 134 (2019).
104. K. Prasai, J. Jiang, A. Mishkin, B. Shyam, S. Angelova, R. Birney, D. A. Drabold, M. Fazio, E. K. Gustafson, G. Harry, S. Hoback, J. Hough, C. Lévesque, I. MacLaren, A. Markosyan, I. W. Martin, C. S. Menoni, P. G. Murray, S. Penn, S. Reid, R. Robie, S. Rowan, F. Schiettekatte, R. Shink, A. Turner, G. Vajente, H.-P. Cheng, M. M. Fejer, A. Mehta, R. Bassiri, High precision detection of change in intermediate range order of amorphous zirconia-doped tantala thin films due to annealing, Phys. Rev. Lett. 123, 045501 (2019).
103. S. Vallières, C. Bienvenue, P. Puyuelo-Valdes, M. Salvadori, E. d’Humières, F. Schiettekatte, P. Antici, Low-energy proton calibration and energy-dependence linearization of EBT-XD radiochromic films, Rev. Sci. Instrum. 90, 083301 (2019).
102. G. Vajente, R. Birney, A. Ananyeva, S. Angelova, R. Asselin, B. Baloukas, R. Bassiri, G. Billings- ley, M. M. Fejer, D. Gibson, L. J. Godbout, E. Gustafson, A. Heptonstall, J. Hough, S. MacFoy, A. Markosyan, I. W. Martin, L. Martinu, P. G. Murray, S. Penn, S. Roorda, S. Rowan, F. Schiettekatte, R. Shink, C. Torrie, D. Vine, S. Reid, R. X. Adhikari, Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings, Class. Quant. Grav. 35, 075001 (2018).
101. J. Wang, S. H. Y. Huang, C. Herrmann, S. A. Scott, F. Schiettekatte, K. L. Kavanagh, Focussed helium ion channeling through Si nanomembranes, J. Vac. Sci. Technol. B 36, 021203 (2018).
Disciplines
- Physics
- Material Engineering and Metallurgic Engineering
Areas of expertise
- Materials science
- Defects and impurities in thin films: doping, implantation
- Atom, molecule, and ion scattering
- Deposition by sputtering
- Kinetics of defect formation and annealing
- Atomic, molecular, and ion beam impact and interactions with surfaces
- Heat capacity of amophous solids and glasses
- Nanoscale materials and structures: fabrication and characterization